Correction of resonant optical scanner dynamic aberrations using nodal aberration theory

利用节点像差理论校正谐振式光学扫描仪的动态像差

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Abstract

The rapid oscillation of galvanometric resonant optical scanners introduces linear astigmatism that degrades transverse resolution, and in confocal systems, also reduces signal [V. Akondi et al., Optica 7, 1506, 2020]. Here, we demonstrate correction of this aberration by tilting reflective or refractive optical elements for a single vergence or a vergence range, with and without the use of an adaptive wavefront corrector such as a deformable mirror. The approach, based on nodal aberration theory, can generate any desired third order aberration that results from tilting or decentering optical surfaces.

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