Abstract
In recent years, advances in materials science and manufacturing technologies have facilitated the development of flexible sensors. However, there are still performance gaps between emerging flexible sensors and traditional silicon-based rigid sensors, especially lacking dynamic modeling and optimization analysis for addressing above challenges. This paper describes a hysteresis dynamic modeling method for flexible humidity sensors. Through inkjet printing and coating methods, the polyvinyl alcohol (PVA) sensitive layer and nano silver interdigital electrode are fabricated on flexible polyethylene naphthalate substrates. The performance characterization results show that the sensitivity and maximum hysteresis within the range of 12-98% relative humidity (RH) are -0.02167 MΩ/% RH and 2.7% RH, respectively. The sensor also has outstanding dynamic response ability and stability in a wide range of humidity variation. The hysteresis mechanism of flexible humidity sensors is theoretically analyzed from microscopic hysteresis processes, Langmuir monomolecular adsorption dynamic modeling, and Fick diffusion dynamic modeling. These hysteresis models provide a path for the hysteresis optimization of flexible PVA humidity sensors. Further exploration of the diffusion rate of water molecules and the proportion of PVA in ink represents promising hysteresis optimization directions of flexible humidity sensors based on PVA-sensitive material.