Sodium Thiophenolate Initiated Polymerization of Methacrylate with Sulfur (S(8)): High-Refractive-Index and -Transparency Polymers for Lithography

硫酚钠引发甲基丙烯酸酯与硫(S(8))的聚合:用于光刻的高折射率和高透明度聚合物

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Abstract

A simple and effective strategy for introducing sulfur into a polymethacrylate matrix at room temperature has been developed, allowing for the polymerization of a variety of methacrylate derivatives with sulfur. The resulting S-containing polymers exhibited a high refractive index of up to 1.72 while retaining over 90% transmittance in the visible region. Additionally, when mixed with 3% photo acid generator (PAG) as photoresist, the formulation demonstrated excellent patterning capabilities. Furthermore, the scalable preparation of high-refractive-index polymers (HRIPs) indicates significant potential for fabrication.

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