Real Time Cascade Impactor Based On Surface Acoustic Wave Delay Lines for PM10 and PM2.5 Mass Concentration Measurement

基于表面声波延迟线的实时级联冲击器用于PM10和PM2.5质量浓度测量

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Abstract

In this research, Surface Acoustic Wave (SAW) sensors are combined with a cascade impactor to perform real time PM10 and PM2.5 mass concentration measurements. The SAW sensors consist of 125 MHz delay lines based on Love waves propagating on an AT-cut quartz substrate. The Love waves are guided on the substrate's surface using a silica layer. SAW sensors themselves are not capable to discriminate particles by their size, therefore, particle separation based on aerodynamic diameter is achieved using a 3 Lpm dedicated cascade impactor. The latter was designed to integrate the SAW sensors which are monitored using a phase shift measurement. The collected particles impact on the acoustic sensor's surface inducing a gravimetric effect that modifies the acoustic wave propagation conditions. The resulted phase shift allows the measurement of the mass deposited on the sensitive zone. The novel cascade impactor with SAW sensors as particle collecting stages is exposed to different aerosols in the 0-150 μg/m³ concentration range and proved to be able to detect and differentiate particles based on their size in real time. The system's response was compared to a commercial optical counter based on light scattering technology and was found to be in good agreement with it.

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