Abstract
In frequency modulation atomic force microscopy (FM-AFM) the stability of the eigenfrequency of the force sensor is of key importance for highest precision force measurements. Here, we study the influence of temperature changes on the resonance frequency of force sensors made of quartz, in a temperature range from 4.8-48 K. The sensors are based on the qPlus and length extensional principle. The frequency variation with temperature T for all sensors is negative up to 30 K and on the order of 1 ppm/K, up to 13 K, where a distinct kink appears, it is linear. Furthermore, we characterize a new type of miniaturized qPlus sensor and confirm the theoretically predicted reduction in detector noise.