Abstract
This paper describes the use of different conducting polymers (polyaniline, poly(o-ethoxyaniline), and polypyrrole) as a sensitive layer on a silicon cantilever sensor. The mechanical response (deflection) of the bimaterial (the coated cantilever) was investigated under the influence of relative humidity. The variations in the deflection of the coated cantilevers when exposed to relative humidity were evaluated. The results indicated a linear sensitivity in ranges, where the high value was obtained for a polypyrrole-sensitive layer between 20 and 45% of humidity. Furthermore, the sensor shows excellent performance along with rapid response and recovery times, relatively low hysteresis, and excellent stability. The sensors developed are potentially excellent materials for sensing low humidity for long time.