Abstract
Implantable pressure sensors enable more accurate disease diagnosis and real-time monitoring. Their widescale usage is dependent on a reliable encapsulation to protect them from corrosion of body fluids, yet not increasing their sizes or impairing their sensing functions during their lifespans. To realize the above requirements, an ultrathin, flexible, waterproof while robust micro-nano composite coating for encapsulation of an implantable pressure sensor is designed. The composite coating is composed of a nanolayer of silane-coupled molecules and a microlayer of parylene polymers. The mechanism and principle of the composite encapsulation coating with high adhesion are elucidated. Experimental results show that the error of the sensors after encapsulation is less than 2 mmHg, after working continuously for equivalently over 434 days in a simulated body fluid environment. The effects of the coating thickness on the waterproof time and the error of the sensor are also studied. The encapsulated sensor is implanted in an isolated porcine eye and a living rabbit eye, exhibiting excellent performances. Therefore, the micro-nano composite encapsulation coating would have an appealing application in micro-nano-device protections, especially for implantable biomedical devices.