Abstract
We report fabrication of a microneedle-based three-electrode integrated electrochemical sensor and in-vitro characterization of this sensor for glucose sensing applications. A piece of silicon was sequentially dry and wet etched to form a 15 × 15 array of tall (approximately 380 µm) sharp silicon microneedles. Iron catalyst was deposited through a SU-8 shadow mask to form the working electrode and counter electrode. A multi-walled carbon nanotube forest was grown directly on the silicon microneedle array and platinum nano-particles were electrodeposited. Silver was deposited on the Si microneedle array through another shadow mask and chlorinated to form a Ag/AgCl reference electrode. The 3-electrode electrochemical sensor was tested for various glucose concentrations in the range of 3~20 mM in 0.01 M phosphate buffered saline (PBS) solution. The sensor's amperometric response to the glucose concentration is linear and its sensitivity was found to be 17.73 ± 3 μA/mM-cm2. This microneedle-based sensor has a potential to be used for painless diabetes testing applications.