Abstract
A low-cost miniature homodyne interferometer (MHI) with self-wavelength correction and self-wavelength stabilization is proposed for long-stroke micro/nano positioning stage metrology. In this interferometer, the displacement measurement is based on the analysis of homodyne interferometer fringe pattern. In order to miniaturize the interferometer size, a low-cost and small-sized laser diode is adopted as the laser source. The accuracy of the laser diode wavelength is real-time corrected by the proposed wavelength corrector using a modified wavelength calculation equation. The variation of the laser diode wavelength is suppressed by a real-time wavelength stabilizer, which is based on the principle of laser beam drift compensation and the principle of automatic temperature control. The optical configuration of the proposed MHI is proposed. The methods of displacement measurement, wavelength correction, and wavelength stabilization are depicted in detail. A laboratory-built prototype of the MHI is constructed, and experiments are carried out to demonstrate the feasibility of the proposed wavelength correction and stabilization methods.