Feasibility Study of a Piezo Actuator as a Potential Standard in Calibration for Roundness Instruments

压电致动器作为圆度仪校准潜在标准的可行性研究

阅读:1

Abstract

The paper presents experimental data that show the possible application of a piezo actuator in the role of calibration standard that can serve as an alternative route to currently available methods like gauge blocks or flick standards. First, the experimental setups for interferometric and roundness instruments measurements were described. Next, the experiments using an interferometer for calibration of the piezo actuator were shown. Finally, the application of a piezo actuator to calibrate the roundness instrument, to state the correction factor for the roundness probe, and to relate it to the unit of metre, assuring the traceability of future measurements was performed. Detailed procedures of simulating grooves and then processing the data were described and the calibration curve was obtained using regression analysis. The estimation of uncertainty provided by different factors during the measurements was given to fulfil as closely as possible real calibration procedures taken up in the measurement laboratories. Finally, the limitations of the presented procedures were presented and discussed.

特别声明

1、本页面内容包含部分的内容是基于公开信息的合理引用;引用内容仅为补充信息,不代表本站立场。

2、若认为本页面引用内容涉及侵权,请及时与本站联系,我们将第一时间处理。

3、其他媒体/个人如需使用本页面原创内容,需注明“来源:[生知库]”并获得授权;使用引用内容的,需自行联系原作者获得许可。

4、投稿及合作请联系:info@biocloudy.com。