Combined Thickness and Permittivity Measurement of Thin Layers with Open-Ended Coaxial Probes

利用开路同轴探针联合测量薄层厚度和介电常数

阅读:1

Abstract

This paper presents a method to simultaneously determine the thickness and permittivity of thin layers from multi-frequency reflection coefficient measurements using an open-ended coaxial probe. This is achieved by exploiting that the probe becomes radiating at frequencies higher than the probe's typical operating range. Permittivity information is extracted from measurements in the typical frequency range, whereas thickness information is obtained from high frequency measurements by exploiting resonances that occur when the radiated waves are reflected at the layer boundary. A finite element model of the measurement set-up is made in COMSOL Multiphysics(TM), and a matrix of simulations spanning the relevant layer thicknesses and permittivity range is generated. The measured permittivity spectra of unknown samples are compared to the simulation matrix to estimate layer thickness and permittivity. The method is verified by measurements of water-ethanol mixtures. An application example where the water fraction and layer thickness of a gas hydrate deposition layer is estimated from permittivity measurements in a multiphase flow loop is also presented.

特别声明

1、本页面内容包含部分的内容是基于公开信息的合理引用;引用内容仅为补充信息,不代表本站立场。

2、若认为本页面引用内容涉及侵权,请及时与本站联系,我们将第一时间处理。

3、其他媒体/个人如需使用本页面原创内容,需注明“来源:[生知库]”并获得授权;使用引用内容的,需自行联系原作者获得许可。

4、投稿及合作请联系:info@biocloudy.com。