Abstract
In this work, we report a passive wireless eddy current proximity sensor based on inductive-capacitive (LC) resonance using a low temperature co-fired ceramic (LTCC) technology. The operation principle of the LC proximity sensor to the metal targets was comprehensively discussed through electromagnetic simulation and circuit model. Copper and aluminum were selected as the metal target materials for the measurements. Circular copper plates with different diameters and thickness were used to investigate the influence of the surface area and thickness of the target on the sensitivity. The decreases of the sensitivity with the decrease of the surface area and thickness were observed. The LC proximity sensor showed a high sensitivity of 11.2 MHz/mm for the proximity distance of 1⁻3 mm, and large detection range up to 10 mm. The developed LC proximity sensor is promising for passive wireless metal detections and proximity measurements under harsh environments.