Abstract
Multivariate time series anomaly detection (MTSAD) can effectively identify and analyze anomalous behavior in complex systems, which is particularly important in fields such as financial monitoring, industrial equipment fault detection, and cybersecurity. MTSAD requires simultaneously analyze temporal dependencies and inter-variable relationships have prompted researchers to develop specialized deep learning models to detect anomalous patterns. In this paper, we conducted a structured and comprehensive overview of the latest techniques in deep learning for multivariate time series anomaly detection methods. Firstly, we proposed a taxonomy for the anomaly detection strategies from the perspectives of learning paradigms and deep learning models, and then provide a systematic review that emphasizes their advantages and drawbacks. We also organized the public datasets for time series anomaly detection along with their respective application domains. Finally, open issues for future research on MTSAD were identified.