Abstract
Monte Carlo simulations were performed to investigate the behavior of the peak to background ratio (P/B) of particles on a substrate as a function of different variables such as take-off angle, tilt angle, particle size, and beam energy. The results showed that the P/B highly depends on the beam energy, the size of particles, and the composition of the substrates. Results showed that the rate of intensity reduction of the peak is less than the background for a high tilt angle (60 degrees), and thereby, the P/B increases at a high tilt angle. It was shown that by increasing the take-off angle, the P/B initially reduces and then reaches a plateau. Results showed that the P/B highly depends on the size of particles. Analyses showed that by moving the electron beam from the center to the side of the particle, the P/B increases. Finally, the spherical particles have higher sensitivity of the P/B to the beam position than the cubical particles.