Abstract
To extend the service life of sensors in seawater, this work prepared an integrated diffusion-plated Al(2)O(3) film using high-power impulse magnetron sputtering (HiPIMS). The tribological properties of the Al(2)O(3) film in a marine environment were tested using a tribometer. The morphology and evolution of the Al(2)O(3) film before and after the friction tests were investigated by characterization techniques such as field emission scanning electron microscopy (FESEM). The results demonstrate that the Al(2)O(3) film exhibits excellent tribological performance in the marine environment, significantly enhancing the wear resistance of the substrate material. Furthermore, with the protection of the Al(2)O(3) film, the designed pressure sensor achieved high-sensitivity detection of minute operational forces underwater. When applied to a robotic gripper for manipulation tasks, the coated underwater sensor enabled accurate perception of subtle motion states of the grasped objects.