Abstract
Quartz crystal microbalances are widely used sensors with applications for the detection of very-low-mass deposition in many different fields, from contamination monitoring in the high vacuum of deep space missions to the monitoring of biological activity or pollution using specifically designed active substrates. These sensors are very stable over time; nevertheless, their sensitivity to the temperature is well known, and different implementations have been devised to correct it, e.g., through compensation with a dual crystal. This paper deals with the effects of temperature on QCM but separates the case of uniform crystal temperature from the case of in-plane temperature gradients considering a QCM based on quartz crystals with deposited film resistors used as both RTDs and heaters. This configuration allows both an accurate temperature measurement and efficient thermal control, allowing the achievement of crystals temperatures in the order of 400 °C higher than the environment with a low power dissipation of the order of 1 W. The film resistors deposited around the electrodes allow directly measuring the average crystal temperature and directly delivering power to the crystal for thermal control. The localized delivery of the heat nevertheless also determines uncommon temperature fields on the crystal, and thus, an analysis of both the effects of temperature on the new microbalance was performed. The temperature gradient has strong effects on the frequency; therefore, along with the temperature, the thermal gradients have tobe compensated. The calibration of the QCM thermometers and the assessment of the achievable measurement accuracy were performed, as well as the determination of the frequency-temperature relationship. The comparison between frequency changes in the case of uniform temperature and those observed while using crystal heaters proved that temperature gradients have a strong effect on the crystal frequency. To identify the temperature field on the crystal surface of a QCM crystal, the gold coating of the deposited films was removed to achieve an emissivity acceptable for thermal imaging with an IR camera. Moreover, image processing for emissivity correction was developed. In order to correlate the temperature gradient with the frequency variation, a test campaign was performed to measure the frequency changes derived from different power levels delivered to the crystal heaters. From this test campaign and thermal analysis, the effect of the thermal gradient was assessed.