Abstract
MET sensors for measuring motion parameters are used in many scientific and technical fields. Meanwhile, the geometries of the transforming cell applied practically are far from optimal, and the influence of many geometric parameters on the sensitivity has not been studied. These parameters include the intercathode distance in a four-electrode conversion cell. In this paper, a mathematical model that allows calculating the behavior of the conversion coefficient depending on the frequency for a cell with flat electrodes at different intercathode distances is constructed. The stationary current is shown to decrease monotonically with the decreasing intercathode distance at the constancy of other system parameters. At the same time, the signal current decreases in the low-frequency region and increases in the high-frequency range. Taking into account the results obtained, practically speaking, it is advisable to reduce the intercathode distance to the technologically possible minimum, which makes the frequency response more uniform and reduces the current consumed by the sensitive element.