Electrostatic Self-Assembly of Diamond Nanoparticles onto Al- and N-Polar Sputtered Aluminum Nitride Surfaces

金刚石纳米粒子在 Al 和 N 极性溅射氮化铝表面上的静电自组装

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作者:Taro Yoshikawa, Markus Reusch, Verena Zuerbig, Volker Cimalla, Kee-Han Lee, Magdalena Kurzyp, Jean-Charles Arnault, Christoph E Nebel, Oliver Ambacher, Vadim Lebedev2

Abstract

Electrostatic self-assembly of diamond nanoparticles (DNPs) onto substrate surfaces (so-called nanodiamond seeding) is a notable technique, enabling chemical vapor deposition (CVD) of nanocrystalline diamond thin films on non-diamond substrates. In this study, we examine this technique onto differently polarized (either Al- or N-polar) c-axis oriented sputtered aluminum nitride (AlN) film surfaces. This investigation shows that Al-polar films, as compared to N-polar ones, obtain DNPs with higher density and more homogeneously on their surfaces. The origin of these differences in density and homogeneity is discussed based on the hydrolysis behavior of AlN surfaces in aqueous suspensions.

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