Abstract
The main aim of the paper is damage detection at the microscale in the anisotropic piezoelectric sensors using surface acoustic waves (SAWs). A novel technique based on the single input and multiple output of Rayleigh waves is proposed to detect the microscale cracks/flaws in the sensor. A convex-shaped interdigital transducer is fabricated for excitation of divergent SAWs in the sensor. An angularly shaped interdigital transducer (IDT) is fabricated at 0 degrees and ±20 degrees for sensing the convex shape evolution of SAWs. A precalibrated damage was introduced in the piezoelectric sensor material using a micro-indenter in the direction perpendicular to the pointing direction of the SAW. Damage detection algorithms based on empirical mode decomposition (EMD) and principal component analysis (PCA) are implemented to quantify the evolution of damage in piezoelectric sensor material. The evolution of the damage was quantified using a proposed condition indicator (CI) based on normalized Euclidean norm of the change in principal angles, corresponding to pristine and damaged states. The CI indicator provides a robust and accurate metric for detection and quantification of damage.