Abstract
Ethanol (EtOH) gas detection has garnered considerable attention owing to its wide range of applications in industries such as food, pharmaceuticals, medical diagnostics, and fuel management. The development of highly sensitive EtOH-gas sensors has become a focus of research. This study proposes an optical interferometric surface stress sensor for detecting EtOH gas. The sensor incorporates a 100 nm-thick freestanding membrane of Parylene C and gas-sensitive polymethylmethacrylate (PMMA) fabricated within a microcavity on a Si substrate. The results showed that reducing the thickness of the freestanding Parylene C membrane is essential for achieving higher sensitivity. Previously, a 100-nm-thick membrane transfer onto microcavities was achieved using a surfactant-assisted release technique. However, polymerization inhibition caused by the surfactant presented challenges in forming ultrathin membranes of several tens of nanometers. In this study, we employed a surfactant-free release technique using a hydrophilic natural oxide layer to successfully form a 14-nm-thick freestanding Parylene C membrane. In contrast, the optimum thickness of the gas-adsorbed PMMA membrane was approximately 295 nm. Moreover, we demonstrated that this thinner membrane improved EtOH gas detection sensitivity by a factor of eight compared with our previously reported sensor. Thus, this study advances the field of nanoscale materials and sensor technology.