Abstract
Fused silica glass is the material of choice for many high-performance components in optics due to its high optical transparency combined with its high thermal, chemical, and mechanical stability. Especially, the generation of fused silica microstructures is of high interest for microoptical and biomedical applications. Direct laser writing (DLW) is a suitable technique for generating such devices, as it enables nearly arbitrary structuring down to the sub-micrometer level. In this work, true 3D structuring of transparent fused silica glass using DLW with tens of micrometer resolution and a surface roughness of Ra ≈ 6 nm is demonstrated. The process uses a two-photon curable silica nanocomposite resin that can be structured by DLW, with the printout being convertible to transparent fused silica glass via thermal debinding and sintering. This technology will enable a plethora of applications from next-generation optics and photonics to microfluidic and biomedical applications with resolutions on the scale of tens of micrometers.