Abstract
Arrayed ultraviolet (UV) LED light sources have been widely applied in various semiconductor processes, ranging from photopolymerization to lithography. In practical cases, based on data provided by manufacturers, calibration of individual UV LEDs is often needed before their real usage in high-precision applications. In this paper, we present a high-precision, automated light source measurement platform, which can be applied to the performance evaluation of various types of light sources. In order to minimize errors introduced by the automated measurement system, the platform employs a sub-pixel measurement technique, along with a twist-angle method, to perform multiple measurements and analyses of the spatial intensity distribution of the light source on a given plane. Through noise analysis of repeated measurements, the platform's effectiveness and reliability are validated within a certain tolerance range. The high-precision automated light source measurement platform demonstrates excellent performance in the precise control and data acquisition of complex light sources. The light source dataset derived from the test results can provide guidance for the optimization of light sources in fields such as lighting, imaging, and lithography.