Abstract
Flexible capacitive pressure sensors (CPSs) have been widely studied and applied due to their various advantages. Numerous studies have been carried out on improving their electromechanical sensing properties through microporous structures. However, it is challenging to effectively control these structures. In this work, we controllably fabricate a hierarchical microporous capacitive pressure sensor (HMCPS) using melt near-field electro-writing technology. Thanks to the hierarchical microporous sensor, which provides a multi-level elastic modulus and relative dielectric constants, the HMCPS shows outstanding sensing properties. Its multi-range pressure response is sensitive: 3.127 kPa(-1) at low pressure, 0.124 kPa(-1) at medium pressure, and 0.025 kPa(-1) at high pressure. Also, it has a stability of over 5000 cycles and a response time of less than 100 ms. The HMCPS can monitor dynamic and static pressures across a broad pressure range. It has been successfully applied to monitor human motions, showing great potential in human-computer interaction and smart wearable devices.