Abstract
Wavelength modulation spectroscopy (WMS) is a representative implementation of tunable diode laser absorption spectroscopy (TDLAS), enabling reliable gas component analysis with concentration-related information derived from harmonic component extraction, while offering enhanced noise immunity for trace gas sensing in open environments. However, due to the strong coupling between laser wavelength and intensity, wavelength modulation inevitably introduces residual amplitude modulation (RAM), which significantly degrades measurement accuracy. To address this issue, this study introduces a RAM suppression algorithm based on multiple harmonic component decoupling (MHCD), using the second-harmonic lateral peak inclination angle (LPIA) as a characteristic indicator. Unit harmonic operators for the first, second, and third harmonics are designed, and an original harmonic reconstruction model is established via linear superposition of harmonic components. The optimal harmonic component ratio is determined at the composite operator with the maximum cross-correlation coefficient, and RAM noise is eliminated through a multi-harmonic decoupling matrix. Repetitive measurements on 22 mm pharmaceutical vials with 4% oxygen concentration demonstrate that MHCD reduces the second-harmonic LPIA from 18.07° to 8.56°. Concentration discrimination experiments conducted on seven groups of 22 mm vials with 2% concentration steps (0-12%) show that MHCD increases the true positive rate by 6-11% and decreases the false positive rate by 4-9%, confirming its effectiveness for pharmaceutical online inspection applications.