Abstract
Macroporous silicon was prepared through an anodization process; the prepared samples showed an average pore size ranging from 4 to 6 microns, and the depth of the pores in the silicon wafer was approximately 80 microns. The prepared samples were tested for hydrogen peroxide (H&sub2;O&sub2;) concentrations, which can be used for industrial and environmental sensing applications. The selected H&sub2;O&sub2; concentration covered a wide range from 10 to 5000 μM. The tested samples showed a linear response through the tested H&sub2;O&sub2; concentrations with a sensitivity of 0.55 μA μM-1∙cm-2 and lower detection limits of 4.35 μM at an operating voltage of 5 V. Furthermore, the electrode exhibited a rapid response with a response time of ca. two seconds. Furthermore, the prepared sensor showed a reasonable stability over a one-month time period.