A nonlinear stiffness softening mechanism for low-bias, high-sensitivity MEMS accelerometers with extended dynamic range
一种用于低偏置、高灵敏度、具有扩展动态范围的MEMS加速度计的非线性刚度软化机制
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-025-01066-3
Firoozy, Peyman; Seifnejad Haghighi, Milad; Kanygin, Mikhail; Ferguson, Philip; Bahreyni, Behraad