A capacitive-piezoelectric hybrid MEMS microphone with signal fusion for enhancing signal-to-noise ratio
一种采用信号融合技术的电容-压电混合式MEMS麦克风,用于提高信噪比
期刊:Microsystems & Nanoengineering
影响因子:9.9
doi:10.1038/s41378-026-01251-y
Guan, Yangyang; Schneider, Michael; Li, Dongsheng; Zhang, Hemin; Mi, Jing; Bertrand, Alexander; Sadeghpour, Sina; Wang, Chen; Liu, Huicong; Glorieux, Christ; Kraft, Michael