Area-selective atomic layer deposition on 2D monolayer lateral superlattices
在二维单层横向超晶格上进行区域选择性原子层沉积
期刊:Nature Communications
影响因子:15.7
doi:10.1038/s41467-024-46293-w
Park, Jeongwon; Kwak, Seung Jae; Kang, Sumin; Oh, Saeyoung; Shin, Bongki; Noh, Gichang; Kim, Tae Soo; Kim, Changhwan; Park, Hyeonbin; Oh, Seung Hoon; Kang, Woojin; Hur, Namwook; Chai, Hyun-Jun; Kang, Minsoo; Kwon, Seongdae; Lee, Jaehyun; Lee, Yongjoon; Moon, Eoram; Shi, Chuqiao; Lou, Jun; Lee, Won Bo; Kwak, Joon Young; Yang, Heejun; Chung, Taek-Mo; Eom, Taeyong; Suh, Joonki; Han, Yimo; Jeong, Hu Young; Kim, YongJoo; Kang, Kibum