A Comparative Study on Synthesizing SiC via Carbonization of Si (001) and Si (111) Substrates by Chemical Vapor Deposition
通过化学气相沉积法在Si(001)和Si(111)衬底上碳化合成SiC的对比研究
期刊:Materials
影响因子:3.2
doi:10.3390/ma18143239
Milenov, Teodor; Avramova, Ivalina; Mehandziev, Vladimir; Zahariev, Ivan; Avdeev, Georgi; Karashanova, Daniela; Georgieva, Biliana; Blagoev, Blagoy; Kirilov, Kiril; Rafailov, Peter; Kolev, Stefan; Dimov, Dimitar; Karaivanova, Desislava; Kalchevski, Dobromir; Trifonov, Dimitar; Grozev, Ivan; Popov, Valentin