Thermally assisted nanotransfer printing with sub-20-nm resolution and 8-inch wafer scalability
具有亚20纳米分辨率和8英寸晶圆可扩展性的热辅助纳米转移印刷
期刊:Science Advances
影响因子:12.5
doi:10.1126/sciadv.abb6462
Park, Tae Wan; Byun, Myunghwan; Jung, Hyunsung; Lee, Gyu Rac; Park, Jae Hong; Jang, Hyun-Ik; Lee, Jung Woo; Kwon, Se Hun; Hong, Seungbum; Lee, Jong-Heun; Jung, Yeon Sik; Kim, Kwang Ho; Park, Woon Ik