3D-Nanoprinted Antiresonant Hollow-Core Microgap Waveguide: An on-Chip Platform for Integrated Photonic Devices and Sensors

3D 纳米打印反谐振空心微间隙波导:用于集成光子器件和传感器的片上平台

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作者:Johannes Bürger, Vera Schalles, Jisoo Kim, Bumjoon Jang, Matthias Zeisberger, Julian Gargiulo, Leonardo de S Menezes, Markus A Schmidt, Stefan A Maier

Abstract

Due to their unique capabilities, hollow-core waveguides are playing an increasingly important role, especially in meeting the growing demand for integrated and low-cost photonic devices and sensors. Here, we present the antiresonant hollow-core microgap waveguide as a platform for the on-chip investigation of light-gas interaction over centimeter-long distances. The design consists of hollow-core segments separated by gaps that allow external access to the core region, while samples with lengths up to 5 cm were realized on silicon chips through 3D-nanoprinting using two-photon absorption based direct laser writing. The agreement of mathematical models, numerical simulations and experiments illustrates the importance of the antiresonance effect in that context. Our study shows the modal loss, the effect of gap size and the spectral tuning potential, with highlights including extremely broadband transmission windows (>200 nm), very high contrast resonance (>60 dB), exceptionally high structural openness factor (18%) and spectral control by nanoprinting (control over dimensions with step sizes (i.e., increments) of 60 nm). The application potential was demonstrated in the context of laser scanning absorption spectroscopy of ammonia, showing diffusion speeds comparable to bulk diffusion and a low detection limit. Due to these unique properties, application of this platform can be anticipated in a variety of spectroscopy-related fields, including bioanalytics, environmental sciences, and life sciences.

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