Silicon Nitride Photonic Integration Platforms for Visible, Near-Infrared and Mid-Infrared Applications

用于可见光、近红外和中红外应用的氮化硅光子集成平台

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Abstract

Silicon nitride photonics is on the rise owing to the broadband nature of the material, allowing applications of biophotonics, tele/datacom, optical signal processing and sensing, from visible, through near to mid-infrared wavelengths. In this paper, a review of the state of the art of silicon nitride strip waveguide platforms is provided, alongside the experimental results on the development of a versatile 300 nm guiding film height silicon nitride platform.

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