Abstract
Tertiarybutylarsine (TBAs) and tertiarybutylphosphine (TBP) are getting more and more established as group V precursors for the growth of V/III semiconductors by metal organic vapor phase epitaxy (MOVPE). Due to this development, the thermal decomposition of these precursors was studied during the growth of GaAs and GaP utilizing the Ga precursors, trimethylgallium (TMGa), triethylgallium (TEGa), and tritertiarybutylgallium (TTBGa), in a horizontal AIXTRON AIX 200 GFR MOVPE system. The decomposition and reaction products were measured in line with a real-time Fourier transform quadrupole ion trap mass spectrometer from Carl Zeiss SMT GmbH. The decomposition temperatures and the related activation energies were determined for all the mentioned precursors under comparable reactor conditions. The decomposition curves suggest, on the one hand, a catalytic effect of the GaAs surface on the decomposition of TBAs. On the other hand, the decomposition products indicate alkyl exchange as a relevant step during the bimolecular decomposition of TBAs and TBP with the Ga precursors TMGa, TEGa, and TTBGa. The catalytic reaction reduces the decomposition temperature of TBAs and TBP by up to 200 °C. In addition, for the growth of GaAs with TBAs and TEGa and for the growth of GaP with TBP and TEGa, a significant decrease of the decomposition temperature with an increasing V/III ratio is observed. This behavior, which is related to an alkyl exchange reaction, gives insights into the low-temperature growth of GaAs and GaP and is converted into an effective V/III ratio. Finally, the growth of GaAs with TTBGa and TBAs is realized at 300 °C below the unimolecular decomposition temperature of TBAs, underlining the catalytic effect of the GaAs surface. Altering the growth surface with trimethylbismuth led to the prevention of the catalytic effect.