High-Vacuum Tribological Behaviors of Wear-Resistant WC/a-C:H Coatings with Strong Adhesion on Zirconia

耐磨WC/aC:H涂层在氧化锆上的高真空摩擦学性能及其与氧化锆的强附着力

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Abstract

To improve the applicability of tetragonal zirconia (TZP) in the high-vacuum friction drive field, a strategy combining Cr ion implantation-modified layer and hydrogen-containing amorphous carbon coating was proposed in this study. The designed coating (WC/a-C:H) consists of a Cr bonding layer, a WC-rich load-bearing layer and an a-C:H target layer. The effects of implantation voltage on the adhesion strength of WC/a-C:H coatings were investigated. The tribological behaviors of WC/a-C:H against TZP and TZP self-mated pairs at various loads in high vacuum were comparatively explored. The results indicated that when the TZP substrate was modified by a Cr ion implantation layer, the WC/a-C:H coating showed obviously better adhesion strength. Therein, at the implantation voltage of 30 kV, the coating exhibited the optimal adhesion of 88 N, which was 112% higher than that of the coating on original TZP. Surprisingly, the WC/a-C:H coating featuring maximum adhesion strength also achieved a high friction coefficient (>0.22) and exceptional wear resistance across a wide load range of 0.5~15 N in high vacuum. Compared with the TZP self-mated wear pairs, the wear rates of both the WC/a-C:H coating and its counterparts decreased by 1~2 orders of magnitude. Unlike the severe abrasive wear and plastic deformation of the TZP self-mated pairs, even at 15 N, the WC/a-C:H coating exhibited mild abrasive wear and adhesive wear mechanisms.

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