Active Compliance Smart Control Strategy of Hybrid Mechanism for Bonnet Polishing

混合机构主动顺应智能控制策略在抛光罩抛光中的应用

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Abstract

Compliance control strategies have been utilised for the ultraprecision polishing process for many years. Most researchers execute active compliance control strategies by employing impedance control law on a robot development platform. However, these methods are limited by the load capacity, positioning accuracy, and repeatability of polishing mechanisms. Moreover, a sophisticated actuator mounted at the end of the end-effector of robots is difficult to maintain in the polishing scenario. In contrast, a hybrid mechanism for polishing that possesses the advantages of serial and parallel mechanisms can mitigate the above problems, especially when an active compliance control strategy is employed. In this research, a high-frequency-impedance robust force control strategy is proposed. It outputs a position adjustment value directly according to a contact pressure adjustment value. An open architecture control system with customised software is developed to respond to external interrupts during the polishing procedure, implementing the active compliance control strategy on a hybrid mechanism. Through this method, the hybrid mechanism can adapt to the external environment with a given contact pressure automatically instead of relying on estimating the environment stiffness. Experimental results show that the proposed strategy adapts the unknown freeform surface without overshooting and improves the surface quality. The average surface roughness value decreases from 0.057 um to 0.027 um.

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